Micro-Vibration Measurement System Ensures Semiconductor Fab Safety During Earthquakes

The semiconductor manufacturing process is extremely sensitive to vibrations, whether they originate internally from sources like foot traffic, fans, and pumps, or externally from factors such as nearby traffic, construction activities, or seismic events like earthquakes. Even minor vibrations can significantly disrupt production yield due to the precision required in manufacturing.

Given Taiwan's susceptibility to earthquakes, micro-vibration measurement systems are essential for local semiconductor manufacturers. These systems help safeguard equipment, reduce operational risks, and ensure the safety of personnel. By leveraging earthquake waves, which include faster P-waves and slower S-waves, these systems can anticipate the magnitude of an earthquake. Upon detecting a P-wave, the system can forecast the impending impact of the S-wave, enabling equipment to take preventive measures 5 to 30 seconds before the more destructive wave arrives. This proactive approach helps minimize earthquake-related injuries and damage.